发明名称 |
DUAL HEMISPHERICAL COLLECTORS |
摘要 |
A system and method for collecting radiation, which may be used in a lithography illumination system. The system comprises a first surface shaped to reflect radiation in a first hemisphere of a source to illuminate in a second hemisphere of the source; and a second surface shaped to reflect radiation in the second hemisphere of the source to an output plane. |
申请公布号 |
WO2004095140(A2) |
申请公布日期 |
2004.11.04 |
申请号 |
WO2003US40315 |
申请日期 |
2003.12.15 |
申请人 |
INTEL CORPORATION |
发明人 |
GOLDSTEIN, MICHAEL;SILVERMAN, PETER |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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