MANUFACTURING METHOD FOR LIQUID DROPLET DISCHARGING HEAD, LIQUID DROPLET DISCHARGING HEAD, AND LIQUID DROPLET DISCHARGING RECORDING DEVICE, ELECTROLUMINESCENT SUBSTRATE MANUFACTURING APPARATUS, MICRO ARRAY MANUFACTURING APPARATUS AND COLOR FILTER MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To obtain a method or the like for effectively securing an equal potential between a vibrating plate and an electrode in the case of anodically joining a silicon substrate and a glass substrate.

SOLUTION: A liquid droplet discharging head manufacturing method for integrally forming a plurality of liquid droplet discharging heads at a wafer or the like substrate has at least a process in which an equal potential contact 24 for directly contacting an electrode part formed at the glass substrate 2, and the silicon substrate to be a cavity plate 1 each other is set between the silicon substrate and the glass substrate 2 before the silicon substrate formed of silicon and to be the cavity plate 1 where a member for discharging a liquid is formed, and the glass substrate 2 where the electrode part including one or a plurality of electrodes 12 for discharging the discharge liquid by pressuring the member are anodically joined.

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