| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection method and a defect inspecting apparatus for easily, accurately, and quickly detecting defects contained in a quartz glass material, especially minute defects, such as bubbles, and foreign objects. SOLUTION: In the method for inspecting the inside of the quartz glass material, and the apparatus for inspecting defects, the quartz glass material to be inspected is irradiated with parallel light and diffusion light having different irradiation directions, and abnormal light caused by reflection and/or bending by defects inside the quartz glass material is detected from light applied to the quartz glass material. COPYRIGHT: (C)2005,JPO&NCIPI
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