摘要 |
<P>PROBLEM TO BE SOLVED: To adequately inspect an output of a semiconductor device. <P>SOLUTION: An output control unit 61 outputs the device data which is inputted from output control units 11, 13 and is outputted from a device 2 and the reference data from a data output unit 12 to an exclusive OR circuit 14, but outputs the preceding input data to the exclusive OR circuit 14 with a delay as much as the shift of input timing when such shift is included in the reference data from the output control unit 13. Namely, as a result, since the device data and reference data synchronously inputted to the exclusive OR circuit 14, the exclusive OR of the corresponding data can be obtained. <P>COPYRIGHT: (C)2005,JPO&NCIPI |