发明名称 METHOD AND APPARATUS FOR MONITORING, DOSING, AND DISTRIBUTION OF CHEMICAL COMPOSITIONS
摘要 It is an object of the present invention to provide a system and method for monitoring, dosing and distribution of a chemical composition in a material treatment process, the chemical composition containing at least one additive for maintaining quality of the chemical treatment process. The system and method include: at least one chemical containing unit configured to contain the chemical composition for the chemical treatment process; a dosing unit fluidly communicating with the at least one chemical containing unit configured to receive the chemical composition therefrom and to add a selected dose of the at least one additive to the chemical composition therein; an online monitor configured to monitor a property of the chemical composition at the dosing unit and to transmit a signal corresponding to the monitored property; and a controller programmed and configured to receive the signal from the online monitor and send a signal to the dosing system to add the selected dose to the chemical composition therein in response to the monitored property.
申请公布号 WO2004094701(A2) 申请公布日期 2004.11.04
申请号 WO2004IB01183 申请日期 2004.04.20
申请人 L'AIR LIQUIDE - SOCIETE ANONYME A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUSE 发明人 ZDUNEK, ALAN, D.;GERMOUNI, OMAR;BARAJAS, ALEJANDRO, A.
分类号 C25D7/12;C25D21/14;H01L21/288 主分类号 C25D7/12
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