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发明名称
Verfahren zur Herstellung eines DRAM-Zellenkondensators
摘要
申请公布号
DE19907062(B4)
申请公布日期
2004.11.04
申请号
DE19991007062
申请日期
1999.02.19
申请人
SAMSUNG ELECTRONICS CO. LTD., SUWON
发明人
CHOI, CHANG-WON;LEE, CHANG-HWAN;JUNG, CHUL;HAN, MIN-SEOK
分类号
H01L27/108;H01L21/02;H01L21/768;H01L21/8242;(IPC1-7):H01L21/824
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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