发明名称 |
CHEMICALLY AMPLIFYING POSITIVE PHOTORESIST COMPOSITION FOR THICK FILM, THICK FILM PHOTORESIST LAYERED BODY, METHOD FOR MANUFACTURING THICK FILM RESIST PATTERN AND METHOD FOR MANUFACTURING CONNECTING TERMINAL |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemically amplifying positive photoresist composition for a thick film which has a favorable and stable shape of a product by plating and excellent plating resistance and which is suitable for manufacturing a connecting terminal or the like, and to provide a thick film photoresist layered body, a method for manufacturing a thick film resist pattern by using the above body, and a method for manufacturing a connecting terminal. <P>SOLUTION: The chemically amplifying positive photoresist composition for a thick film is used to form a thick film photoresist layer of 10 to 150 μm film thickness on a supporting body. The composition contains: (A) a compound which generates an acid by irradiation of active rays or radiation; (B) a resin which increases the solubility with an alkali by the effect of an acid; and (C) an alkali-soluble resin. The (B) component contains (b1) a resin comprising a copolymer containing a structural unit having a specified structure. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2004309776(A) |
申请公布日期 |
2004.11.04 |
申请号 |
JP20030102956 |
申请日期 |
2003.04.07 |
申请人 |
TOKYO OHKA KOGYO CO LTD |
发明人 |
OKUI TOSHIKI;MISUMI KOICHI;SAITO KOJI |
分类号 |
G03F7/039;H01L21/027;H01L21/60 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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