| 摘要 |
PROBLEM TO BE SOLVED: To provide an effective and appropriate airtightness testing method for checking and evaluating the airtightness performance of a clean room as a whole. SOLUTION: According to this testing method for checking and evaluating the airtightness performance of the clean room 1 as a whole, a blower is operated to send outside air to the clean room 1 with all the opening parts closed provided between the clean room 1 and its exterior, thereby pressurizing the interior of the clean room 1 while measuring the volume of air necessary for keeping the internal pressure at a prescribed set pressure, to check and evaluate the airtightness performance of the clean room 1 as a whole based on the measurement result. As the blower for the test, a blower 6a can be used which is built in an outside air conditioner 6 provided in the clean room. COPYRIGHT: (C)2005,JPO&NCIPI
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