DIELECTRIC FILMS AND METHODS OF FORMING SAME,申请号EP20000959525-传众专利搜索

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发明名称	DIELECTRIC FILMS AND METHODS OF FORMING SAME
摘要
申请公布号	EP1212476(B1)	申请公布日期	2004.11.03
申请号	EP20000959525	申请日期	2000.08.28
申请人	MICRON TECHNOLOGY, INC.	发明人	BASCERI, CEM;GEALY, DAN
分类号	H01L21/316;C23C16/40;H01L21/02;H01L21/314;H01L21/8242;H01L27/108;(IPC1-7):C23C16/40;H01B3/12;H01G4/12;C04B35/47;C04B35/472;C04B35/468	主分类号	H01L21/316
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