| 发明名称 |
MEMS device having a flexure with integral electrostatic actuator |
| 摘要 |
A micro-electro-mechanical device comprises a moveable mass, a frame for supporting the mass, and a flexure extending between the mass and the frame. The flexure includes an integral actuator for moving the mass member with respect to the frame.
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| 申请公布号 |
US6812617(B2) |
申请公布日期 |
2004.11.02 |
| 申请号 |
US20020125098 |
申请日期 |
2002.04.18 |
| 申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
IVES THOMAS WAYNE |
| 分类号 |
B81B3/00;B81B7/00;H02N1/00;(IPC1-7):H02N1/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
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