ALIGNER AND EXCHANGING METHOD AND EXPOSURE METHOD FOR VARIABLE-PATTERN FORMING DEVICE IN EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an aligner in which a variable-pattern forming device can be exchanged easily. SOLUTION: In the aligner with the variable-pattern forming devices 10a to 10e forming transfer patterns and projection optical systems PL1 to PL5 projecting the images of the transfer patterns formed by the forming devices on a photosensitive substrate, the aligner has a reference-mark display means for displaying reference marks in the forming devices and a measuring means for measuring the positions of the reference marks. COPYRIGHT: (C)2005,JPO&NCIPI