| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporation source which has a small heat load on an evaporant material such as a sublimable organic material suitably used for manufacturing an organic electroluminescent device and stably evaporates a large amount of the evaporant material over a long period of time, an evaporation method, a deposition apparatus and a manufacturing method of the organic electroluminescent device which has a wide range of choice of the organic material and a high productivity. SOLUTION: The evaporation source is equipped with a housing part which houses the evaporant material, an evaporation part which is a part of the housing part and has an aperture, a heating means which heats the evaporation part to the evaporation temperature of the evaporant material and a supplying means which supplies the evaporant material from the housing part to the evaporation part. COPYRIGHT: (C)2005,JPO&NCIPI
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