CATADIOPTRIC REDUCTION LENS COMPRISING A POLARISATION BEAM SPLITTER

摘要

The invention relates to a catadioptric projection lens for reproducing a pattern that is located on the object plane of the projection lens on the imaging plane of said projection lens. The latter comprises an optical axis, a catadioptric first lens part (103) with a concave mirror (105) and a physical beam splitter (106) comprising at least one polarisation-selective beam-splitter layer (107), in addition to a second, preferably dioptric lens part (103). A retroreflective mirror (110) is situated in the optical path that includes the concave mirror (105), said retroreflective mirror retroreflecting the radiation emanating from the beam splitter towards said beam splitter. The multiple use of the beam splitter that is thus possible enables the creation of novel constructions, also including in particular catadioptric projection lenses with coaxial object and image fields.