发明名称 |
EXPLOSION WELDED DESIGN FOR COOLING COMPONENTS |
摘要 |
A method and apparatus are described for making a coldplate. A first component of, for example copper, is explosion welded to a second component of, for example aluminum. The first metal component has a top surface opposite the second metal component and at least one channel proximate the top surface adapted to carry a cooling fluid. The coldplate can be used as an interior wall for a plasma chamber. |
申请公布号 |
WO2004093158(A2) |
申请公布日期 |
2004.10.28 |
申请号 |
WO2004US09769 |
申请日期 |
2004.03.31 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
DILLON, STEVE;MAUCK, JUSTIN |
分类号 |
B23K20/08;H01J37/32 |
主分类号 |
B23K20/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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