发明名称 |
ALIGNMENT FEATURES IN A PROBING DEVICE |
摘要 |
An image of an array of probes is searched for alignment features. The alignment features are then used to bring contact targets and the probes into contact with one another. The alignment features may be a feature of one or more of the tips of the probes. For example, such a feature may be a corner (462b) of one of the tips. An array of probes may be formed to have such alignment features. |
申请公布号 |
WO2004092750(A1) |
申请公布日期 |
2004.10.28 |
申请号 |
WO2004US11289 |
申请日期 |
2004.04.12 |
申请人 |
FORMFACTOR, INC. |
发明人 |
KIM, TAE MA;NAGAI, BUNSAKI |
分类号 |
G01R1/067;G01R3/00 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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