Film bulk acoustic resonator (FBAR) device and method for fabricating the same

摘要

Disclosed are a film bulk acoustic resonator (FBAR) device and a method for fabricating the film bulk acoustic resonator (FBAR) device. The film bulk acoustic resonator (FBAR) device comprises a membrane layer having a plurality of active regions and provides different resonant frequencies by providing different thicknesses of the active regions of series resonators and shunt resonators, and by controlling the thicknesses, respectively. A plurality of the film bulk acoustic resonator (FBAR) devices having different resonant frequencies are manufactured on a substrate, thereby simultaneously manufacturing a transmission filter and a reception filter on the same substrate. Further, the film bulk acoustic resonator (FBAR) device has a stable structure and excellent characteristics.