Verfahren zur Herstellung von Halbleiterchips,申请号DE2002195893T-传众专利搜索

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发明名称	Verfahren zur Herstellung von Halbleiterchips
摘要
申请公布号	DE10295893(T5)	申请公布日期	2004.10.28
申请号	DE2002195893T	申请日期	2002.11.15
申请人	DISCO CORP., TOKIO/TOKYO	发明人	KITA-MURA, MASAHIKO;YAJIMA, KOICHI;KIMURA, YUSUKE;TABUCHI, TOMOTAKA
分类号	H01L21/00;H01L21/301;H01L21/304;H01L21/44;H01L21/68;H01L21/78;H01L21/784;(IPC1-7):H01L21/301	主分类号	H01L21/00
代理机构		代理人
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