发明名称 PROCESS FOR FORMING ORGANIC INSULATING FILM, ORGANIC INSULATING FILM, AND DISPLAY
摘要 PROBLEM TO BE SOLVED: To provide a process for forming an organic insulating film having enhanced heat resistance and being used in various displays efficiently through a simple operation, and to provide an organic insulating film being obtained through that process and a display employing it. SOLUTION: In the process for forming an organic insulating film, an electrically insulating resin film patterned on a substrate is heated at 50°C or above and irradiated with light of 200-400 nm under an inactive gas atmosphere to form a patterned organic insulating film. An organic insulating film formed through the process and a display having the organic insulating film are also provided. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004303770(A) 申请公布日期 2004.10.28
申请号 JP20030091575 申请日期 2003.03.28
申请人 NIPPON ZEON CO LTD 发明人 OMORI HIROKI
分类号 G02F1/1333;H01L21/312;H01L51/50;H05B33/10;H05B33/14;H05B33/22;(IPC1-7):H01L21/312 主分类号 G02F1/1333
代理机构 代理人
主权项
地址
您可能感兴趣的专利