| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To simplify work from a sample preparation to an observation, to prepare a sample in one device, and to easily transfer the prepared sample to an analyzer. <P>SOLUTION: This sample preparing device is constituted of at least an irradiation optical system for emitting an ion beam, a secondary particle detecting means for detecting a secondary particle generated from a sample piece by irradiation of the ion beam, a side entry type of sample stage for mounting a sample holder for mounting the sample piece to fix the analytical sample, and a transfer means for transferring the picked-up sample provided by separating one portion of the sample piece to the sample holder. The work from the sample preparation up to the observation is simplified thereby, the sample is prepared in one device, the prepared sample is easy to be transferred to the analyzer, and the possibility of sample damage is reduced thereby. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
