| 摘要 |
PROBLEM TO BE SOLVED: To prevent a membrane from being broken due to the expansion and contraction of a fluid inside a hollow part formed below the membrane in a semiconductor sensor having a membrane structure when the semiconductor sensor is being used. SOLUTION: The semiconductor sensor 10 is provided with both a substrate 30 and the membrane 20 formed in its upper surface, and the bottom surface of the substrate 30 is glued to a mounting surface 50 for mounting the sensor 10. The semiconductor sensor has pressure difference regulating means 22a-22c for eliminating the pressure difference of the fluid inside and outside the hollow part 34 at use. By providing the pressure difference regulating means, it is possible to eliminate the pressure difference of the fluid inside and outside the hollow part due to temperature changes and prevent the membrane from being broken due to the deformation of the membrane which occurs due to the pressure difference. COPYRIGHT: (C)2005,JPO&NCIPI
|
