发明名称 |
Device for etching a disk-like object |
摘要 |
The arrangement has a device (12) for contactlessly holding an object (16) and at least two guide elements (18) mounted perpendicularly to the device. Each guide element has at least one associated nozzle device (20) via which a gaseous treatment medium is directed against the underside of the object immediately adjacent to the guide element. |
申请公布号 |
EP1020894(A3) |
申请公布日期 |
2004.10.27 |
申请号 |
EP19990125780 |
申请日期 |
1999.12.23 |
申请人 |
SEZ AG |
发明人 |
LANGEN, KURT, DI.;ENGESSER, PHILLIPP |
分类号 |
H01L21/306;H01L21/00;H01L21/683 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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