发明名称 Fabrication method of metallic nanowires
摘要 A fabrication method of metallic nanowires includes the steps of: forming a layer of autocatalytic metal with a thickness of 30 nm-1000 nm on the surface of a substrate; and forming nanowires on the front surface of the layer of autocatalytic metal, wherein the substrate is put into an evaporator and the layer of autocatalytic metal is grown by autocatalytic reaction for 10~5000 seconds. A large amount of nanowires can be grown on a substrate without a lithography process.
申请公布号 US6808605(B2) 申请公布日期 2004.10.26
申请号 US20020266352 申请日期 2002.10.07
申请人 KOREA INSTITUE OF SCIENCE AND TECHNOLOGY 发明人 LEE YUN-HI;JU BYEONG-KWON;JANG YOON-TAEK;CHOI CHANG-HOON
分类号 C23C14/14;C23C14/58;C23C16/02;C23C16/44;H01J9/02;H01L21/28;H01L21/285;H01L21/30;(IPC1-7):C23C14/34;C23C8/00;B05D1/36 主分类号 C23C14/14
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