发明名称 Method for manufacturing laminated dielectrics
摘要 A method of manufacturing large-sized laminated dielectrics of high quality which permit adjustment of the atmosphere during sintering process to be accomplished easily, and which can eliminate the problems such as expansion due to reaction with the atmosphere gas. When a laminated body 1, consisting of oxide dielectric layers 2 and inner electrode layers 3 having a base metal such as Cu as a main component, is sintered in a reducing atmosphere, a mixed gas having CO2 gas as a main component and containing optional amount of CO gas and O2 gas is used. By using the equilibrium system of CO2⇄2CO+(1/2)O2 and adjusting the amounts of CO gas and O2 gas, oxygen partial pressure in the atmosphere gas can be easily and stably adjusted and fluctuation and variation in the atmosphere can be suppressed.
申请公布号 US6809040(B2) 申请公布日期 2004.10.26
申请号 US20020209670 申请日期 2002.08.01
申请人 DENSO CORPORATION 发明人 SUMIYA ATSUHIRO;YASUDA ETURO;SHINDO HITOSHI;SUZUKI YASUNORI;YAMAMOTO TAKASHI;NAGAYA TOSHIATSU;KIHARA NORIAKI
分类号 H01L41/22;C04B35/493;C04B35/638;H01L41/083;H01L41/187;H01L41/24;(IPC1-7):H01L21/31 主分类号 H01L41/22
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