FRICTION TEST APPARATUS FOR ICRO-SIZED PARTS FOR A MICRO DEVICE

摘要

PURPOSE: A friction test apparatus is provided to analyze a frictional characteristic of micro-sized parts for a micro device by applying a minimum load of 0.005N and a minimum stroke of 10 micrometer. CONSTITUTION: A friction test apparatus includes a driving unit(20), a detecting unit, a load applying unit(30), a measurement unit(40) and a control unit. The driving unit(20) linearly moves a flat plate specimen(10). The detecting unit is provided on the driving unit(20) in order to measure a driving state of the driving unit(20). The load applying unit(30) applies load to a ball specimen(14) positioned at an upper portion of the flat plate specimen(10). The control unit controls the operation of the driving unit(20) and the load applying unit(30) by receiving measurement values from the detecting unit and the measurement unit(40).