WAFER MAPPING APPARATUS OF SEMICONDUCTOR FABRICATION EQUIPMENT USING ELECTROMAGNET

摘要

PURPOSE: A wafer mapping apparatus of semiconductor fabrication equipment is provided to sense accurately a loading state of a wafer into a slot of a cassette by using an electromagnet. CONSTITUTION: A cassette(104) is installed in an inside of a load lock chamber and includes a slot to load a plurality of wafers. A door(108) is installed at one side of the load lock chamber in order to perform an opening operation and a shutting operation. The first and the second electromagnets(110,112) are installed horizontally to a center part of the inside of the load lock chamber and the inside of the door. The first and the second electromagnets are used for sensing the loading states of the wafers according to a variation of magnetic field when the cassette is elevated vertically.