发明名称 PHOTOSENSITIVE COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive composition having high sensitivity for laser light in a blue-violet region, excellent safelight property with a yellow lamp, and in particular, suitably used for a direct drawing method using blue-violet laser light. <P>SOLUTION: The photosensitive composition contains a light absorbing dye comprising a salt of pyridine cation or pyrimidine cation and boron anion, or a salt of pyrrole cation or imidazole cation and boron anion. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004295058(A) 申请公布日期 2004.10.21
申请号 JP20030126253 申请日期 2003.05.01
申请人 MITSUBISHI CHEMICALS CORP 发明人 URANO TOSHIYOSHI
分类号 G03F7/029;G03F7/004;G03F7/038;G03F7/039;H01L21/027 主分类号 G03F7/029
代理机构 代理人
主权项
地址