| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier device that can be moved speedily and hence can shorten a cycle time. SOLUTION: The carrier device 10 comprises a plurality of supports 22 where a retention mechanism 20 arranged in a carrier truck supports a substrate K to be treated slantwise; upper and lower substrate support nibs 30 and 29 that are provided in the support 22 and have downward recesses 30' where the circumferential section of the upper side of the substrate K to be treated is inserted, and an upward recess 29' for supporting the substrate K to be treated while the substrate K to be treated is lifted from a lower side, respectively; a link mechanism that moves at least one of the upper and lower substrate support nibs 30, 29 in a direction for separating from and opening the circumferential section of the substrate K to be treated or a direction approaching/grasping the circumferential section of the substrate K to be treated; and an operation means 40 for operating the link mechanism by transmitting a driving force from an external drive means. Then, the lower substrate support nib 29 is connected to a link 27 by an attenuation means 28. COPYRIGHT: (C)2005,JPO&NCIPI
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