| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent generation of noise due to a damage given to regions corresponding to photo diodes at the time of packaging in a photodiode, its manufacturing method and a radiation detector. <P>SOLUTION: In a photodiode array 1 where a plurality of photodiodes 4 are formed in an array on the side of an n-type silicon substrate 3 opposite to the incident surface of a light L to be detected, spacers 6 having a specified height formed of resin, metal or an insulating material are provided in regions on the incident surface side not corresponding to regions where the photodiodes 4 are formed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
