发明名称 |
LOADING TABLE AND HEAT TREATING APPARATUS HAVING THE LOADING TABLE |
摘要 |
<p>A heat treating apparatus, wherein a treated body (W) is placed on the upper surface of a loading table (32) which is erected from the bottom part of a treatment container (4) through a column and in which a heating means (38) is buried and a specified heat treatment is applied to the treated body. Insulating cover members (72), (74), and (76) are installed on the upper surface, side surface, and lower surface of the loading table. Thus, since metallic atoms causing contamination can be prevented from being thermo-diffused from the loading table, various contaminations such as metallic contamination and organic substance contamination can be prevented from occurring.</p> |
申请公布号 |
WO2004090960(A1) |
申请公布日期 |
2004.10.21 |
申请号 |
WO2004JP05036 |
申请日期 |
2004.04.07 |
申请人 |
TOKYO ELECTRON LIMITED;KAWASAKI, HIROO;IWATA, TERUO;AMIKURA, MANABU |
发明人 |
KAWASAKI, HIROO;IWATA, TERUO;AMIKURA, MANABU |
分类号 |
C23C16/458;H01L21/00;H01L21/687;(IPC1-7):H01L21/205;H01L21/31 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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