发明名称 QUALITY CONTROL SYSTEM AND QUALITY CONTROL METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a quality control system which can accurately and easily detect a lot that the probability of abnormality is high, and to provide a quality control method. <P>SOLUTION: The quality control system 1 comprises a data control server 5 for collecting/storing the lot inspection results of an arbitrary lot which is inspected and output by an inspection means 2, an arithmetic processing unit 10 connected to the server 5 via communication lines 7, and a display 20 connected to the unit 10. The arithmetic processing unit 10 is equipped with an arithmetic section 11 which performs arithmetic processing based on the lot inspection results and outputs an overall index value p and a variation coefficient CV, an abnormality judging section 12 which judges if the lot includes abnormality or not and outputs judgement results, and a warning output section 13 which outputs an alarm warning based on the judgement results. The inspection means 2 and the data server 5 are connected to communication lines 6, and the lot inspection results are collected in real time. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2004296826(A) 申请公布日期 2004.10.21
申请号 JP20030087774 申请日期 2003.03.27
申请人 NEC KYUSHU LTD 发明人 FUKUNAGA MITSUHIRO
分类号 H01L21/66;G06Q50/00;G06Q50/04;H01L21/02;(IPC1-7):H01L21/66 主分类号 H01L21/66
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