| 摘要 |
PROBLEM TO BE SOLVED: To provide a form-variable mirror which has a plurality of fixed electrodes and is prevented from bringing about pull-in. SOLUTION: A form-variable mirror 100 has a plurality of fixed electrodes 112 provided on the upper surface of a substrate 110 and a conductive flexible film 114 which is supported in opposition to and apart from the fixed electrodes 112 by a pair of support parts 120. The flexible film 114 consists of an elastically deformable film 116 having an insulating property and a reflecting film 118 functioning as a counter electrode to the fixed electrodes 112. Furthermore, the form-variable mirror 100 has a shape measuring instrument 128 for measuring the shape of the flexible film 114 and a control circuit 122 which controls an applied voltage to each fixed electrode 112 on the basis of the shape measured by the shape measuring instrument 128 so that intervals between the flexible film 114 and all the fixed electrodes 112 are kept equal to or longer than 2/3 of those at the time of non-deformation. COPYRIGHT: (C)2005,JPO&NCIPI |
