发明名称 Düse für ein Lichtbogenplasma-Beschichtungsgerät
摘要 <p>A nozzle-injector was designed and fabricated for plasma deposition of thin-film coatings using a wall-stabilized arc torch as the plasma generator. The divergent design of the nozzle-injector controls the injection, ionization, and reaction of the reagents, and these functions, in turn, determine the coating deposition rate, coating area, coating composition, and coating quality. <IMAGE></p>
申请公布号 DE69826183(D1) 申请公布日期 2004.10.21
申请号 DE1998626183 申请日期 1998.06.26
申请人 GENERAL ELECTRIC CO., SCHENECTADY 发明人 YANG, BARRY LEE-MEAN
分类号 H05H1/42;B05B7/22;B05B12/12;C23C4/12;C23C16/44;C23C16/455;C23C16/50;C23C16/513;H01L21/205;H01L21/31;(IPC1-7):B05B7/22 主分类号 H05H1/42
代理机构 代理人
主权项
地址