摘要 |
<P>PROBLEM TO BE SOLVED: To reduce effects of wraparound signals, which enter a monitor electrode from a drive electrode, upon vibrative drive of a weight part in an angular velocity sensor device. <P>SOLUTION: The angular velocity sensor device newly employs a switch (S1) which can select one of a first drive signal and a second drive signal having phases reverse to each other and being applied on the drive electrode in order to vibrate the weight part (8) in a first direction (X), and an adding circuit (29) which adjusts the magnitude of the drive signal selected by the switch and adds it to a monitor signal representing a vibrational state of the weight part. Output signals of the adding circuit are adjusted so that wraparound signal components existing therein are made minimally, and are used as feedback signals which are fed to a self-exitation oscillator circuit generating the first and second drive signals. <P>COPYRIGHT: (C)2005,JPO&NCIPI |