发明名称 CREATION OF A PERMANENT STRUCTURE WITH HIGH THREE-DIMENSIONAL RESOLUTION
摘要 The aim of the invention is to create a permanent structure with high three-dimensional resolution. Said aim is achieved by supplying a substance in a writing zone (7), which can be modified with the aid of an optical signal (5). Said optical signal (5) is applied to the writing area (7) so as to specifically leave out a spatially limited partial area wherein a state (C) of the substance, which is different from the state in the partial areas of the writing zone (7) reached by the optical signal (5), is permanently adjusted. The partial area specifically omitted by the optical signal (5) represents a minimum local intensity (9) of the optical signal (5) while the optical signal (5) is applied outside the specifically omitted spatially limited partial area in such a way that saturation is reached when the substance is modified by means of the optical signal (5). Hence, it is possible to fall below the diffraction limit in the created structure.
申请公布号 WO2004090950(A2) 申请公布日期 2004.10.21
申请号 WO2004EP03768 申请日期 2004.04.08
申请人 MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN E.V.;HELL, STEFAN 发明人 HELL, STEFAN
分类号 G03F7/20;G11B7/0045;G11B7/244;G11B7/246;H01L21/027 主分类号 G03F7/20
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