摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high quality semiconductor light emitting element and its fabricating process. <P>SOLUTION: The process for fabricating a semiconductor light emitting element comprises steps for preparing a first substrate, for forming a ball up preventive layer on the first substrate, for obtaining a supporting substrate by forming a bonding layer of eutectic material on the ball up preventive layer, for preparing a second substrate, for forming a semiconductor light emitting layer on the second substrate, for forming a first electrode in at least a partial region on the semiconductor light emitting layer, for forming a barrier layer in a region including the top of the first electrode, for obtaining a multilayer semiconductor structure by forming a metal layer on the barrier layer, for bonding the bonding layer of the supporting substrate and the metal layer of the multilayer semiconductor structure to obtain a bonded body, for removing the second substrate from the bonded body, and for obtaining a semiconductor light emitting element by forming a second electrode in a partial region on the semiconductor light emitting layer exposed to the surface of the bonded body. <P>COPYRIGHT: (C)2005,JPO&NCIPI |