WET PROCESS APPARATUS AND WET PROCESS METHOD TO PREVENT ULTRASONIC VIBRATOR FROM BEING DAMAGED

摘要

PURPOSE: A wet process apparatus is provided to prevent an ultrasonic vibrator from being damaged, by enlarging the dimension of the thickness of a vibration part, by scattering the heat generated by ultrasonic vibration and by avoiding an increase in the temperature of the ultrasonic vibrator. CONSTITUTION: A wet process apparatus maintains process liquid(2) in a gap between a pair of confronting nozzles, processing an object(W) to be processed inside the gap. Each of the pair of nozzles has a vibration supply unit for supplying vibration to the process liquid. The vibration supplied from the vibration supply unit of each nozzle to the process liquid is symmetrical with respect to both surfaces of the object to be processed.