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发明名称
ABDICHTUNGSMITTEL UND DESSEN VERWENDUNG IN ABSCHEIDUNGSREAKTOR
摘要
申请公布号
AT276381(T)
申请公布日期
2004.10.15
申请号
AT20000951330T
申请日期
2000.07.03
申请人
AIXTRON AG
发明人
FRIJLINK, PETER
分类号
C23C16/54;C23C16/44;C30B25/14;H01L21/205;(IPC1-7):C23C16/44
主分类号
C23C16/54
代理机构
代理人
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地址
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