| 摘要 |
PROBLEM TO BE SOLVED: To enhance liquid-tightness inspection precision when evaluating a liquid-tight condition by a pressure drop level of a fluid filled in a fluid passage component. SOLUTION: In this inspection device, the liquid-tight condition in the fluid passage component is evaluated based on the pressure drop level of the pressurized liquid supplied to the fluid passage component. The device is provided with a fluid supply route 5 for introducing the fluid pressurized by a pressurized fluid supply source 2 into the fluid passage component 9, the first opening and closing valve 3 provided between the fluid supply source 2 and the fluid passage component 9 in the fluid supply route 5 to make the fluid flow and blocked, and the second opening and closing valve 4 branched from a fluid supply route part 5a between the first opening and closing valve 3 and the fluid passage component 9 in the fluid supply route 5, to be connected. The second opening and closing valve 4 has volumes R4, V4 same to volumes R3, V3 varied with the flowing and the blocking in the first opening and closing valve 3, and conducts a blocking operation and a flowing operation with respect to a flowing operation and a blocking operation in the first opening and closing valve 3. COPYRIGHT: (C)2005,JPO&NCIPI
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