| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for measuring detection/detuning in a short period of time without individually measuring a drive resonance frequency and a detection resonance frequency. <P>SOLUTION: The detection/detuning of a vibrator is measured, the vibrator being equipped with detection vibration parts 22A and 22B, a plurality of drive vibration parts 21A to 21D, drive means 5A to 5D for exciting the vibration of a drive mode for the drive vibration parts, and detection means 7A and 7B for detecting the vibration of a detection mode excited by the detection vibration parts according to physical values. The detection/detuning is measured based on a change of leak vibration signals when changing the resonance frequency of the vibration of the drive mode. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
