| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer carrier in which a variety of wafer sizes can be recognized without arranging a sensor additionally, and to provide a carrying method. SOLUTION: The wafer carrier comprises an arm mechanism section 5 for taking out a wafer 1 from a cassette 2 containing the wafer 1, one detecting section 9 for detecting positional information at two points of the edge part of the wafer taken out at the arm mechanism section during the carrying process of the wafer, and a control section for recognizing the size of the wafer based on the distance between two points detected at the detecting section. COPYRIGHT: (C)2005,JPO&NCIPI
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