METHOD AND SYSTEM FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method and a system for manufacturing a semiconductor device by which the mass production of a semiconductor device can be developed smoothly by selecting an aligner by evaluating the product transferability of the aligner by a simple method without using any special reticle nor a sensor on the aligner. SOLUTION: The aligner is selected without performing any trial calcining by calculating coma aberration and curvature of field having effects on the dimensional distribution of the circuit pattern of a semiconductor device, and predicting whether or not the circuit pattern satisfies the standard of the semiconductor device at the time of transferring the pattern. COPYRIGHT: (C)2005,JPO&NCIPI