| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a device for refining sulfur hexafluoride by which the sulfur hexafluoride can be recovered from a gaseous mixture containing the sulfur hexafluoride in nitrogen at high purity and a high recovery rate, and the exhausted nitrogen is hardly contain the sulfur hexafluoride. <P>SOLUTION: In the method for refining the sulfur hexafluoride, a first adsorption operation where active carbon selectively adsorbing sulfur hexafluoride compared with nitrogen is used, sulfur hexafluoride in a gaseous mixture is adsorbed on the active carbon to exhaust nitrogen which is not adsorbed on the active carbon, and further, the gas in which the sulfur hexafluoride is concentrated is recovered; and a second adsorption operation where 5A type zeolite selectively adsorbing nitrogen compared with sulfur hexafluoride is used, the nitrogen in the gaseous mixture is adsorbed on the 5A type zeolite to collect the sulfur hexafluoride which is not adsorbed on the 5A type zeolite, and the gas in which the nitrogen is concentrated is recovered are combinedly performed, so that the sulfur hexafluoride in the gaseous mixture in which the sulfur hexafluoride is contained in the nitrogen is refined to a high purity, and is recovered. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
