| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact pump device driven at a high speed and suppressed in the manufacturing cost. <P>SOLUTION: A cylinder part 2 of a housing 5 is closed by two unimorph type actuators 6 and 7. The two unimorph type actuators 6 and 7 are arranged so that diaphragms 6a and 7a thereof face to each other, and a pump chamber 2a is formed between the diaphragms 6a and 7a. A suction opening 3a and a discharge opening 4a are communicated with the pump chamber 2a. A duck bill type check valve 8 is fitted in the suction opening 3a, and a duck bill type check valve 9 is fitted in the discharge opening 4a. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
