MANUFACTURING METHOD OF CHAMBER, BOARD PROCESSING UNIT AND SEMICONDUCTOR UNIT USING THIS

摘要

PROBLEM TO BE SOLVED: To obtain the structure of the vacuum chamber that can vacuum seal easily by a plate-like material and a seal material solving the problems for the waste of material in the machined method by the machine processing from a block, the heat distortion removal work by the weld heating and the high cost as the finish processing is required. SOLUTION: Four pieces or more side face materials 1 to 4 that are composed of a hollow frame body 11 closed toward the circumference joining an end face mutually and an upper face member 5, and a lower face member 6 that are arranged and jointed on the upper face and the lower face of this hollow frame body 11 are made to an integral airtight vacuum chamber structure by providing a seal member 7 between mutual adjoining joint faces of the respective member. COPYRIGHT: (C)2005,JPO&NCIPI