| 发明名称 |
Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor |
| 摘要 |
A servo control system for a micro-electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.
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| 申请公布号 |
US2004204776(A1) |
申请公布日期 |
2004.10.14 |
| 申请号 |
US20030411136 |
申请日期 |
2003.04.11 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SRI-JAYANTHA SRI M.;DANG HIEN;SHARMA ARUN;ELEFTHERIOU EVANGELOS S.;LANTZ MARK A.;POZIDIS CHARALAMPOS |
| 分类号 |
G05B19/18;G11B;G11B7/085;G11B7/09;(IPC1-7):G05B19/18 |
主分类号 |
G05B19/18 |
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