| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a normal-pressure plasma treatment device capable of facilitating a replacement work of a solid dielectric and which can be stably installed on an upper electrode. <P>SOLUTION: The upper electrode 11 of the normal-pressure plasma treatment device is divided into an opposite side electrode member to a lower electrode 21 and a back side electrode member 13 at a reverse side. These electrode members 12, 13 is made free to be separated from and to be pressed against each other by a bolt 14 (a retaining mechanism). The back side electrode member 13 is provided with a refrigerant path 13a, a connecting part of a power-feeding wire 41 from an electric field impressing means 40, and a support part to a device main body, and a solid dielectric plate 71 is integrally fitted to an opposing face with the electrode 21 of the opposite side electrode member 12 so as to cover it. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
