| 摘要 |
PROBLEM TO BE SOLVED: To provide a driving method for an ultrasonic composite vibrator for an ultrasonic processing machine, the method being capable of performing automatic tracking of resonance frequency and constant-amplitude elliptical vibration. SOLUTION: In the driving method for the ultrasonic composite vibrator, a phase difference in driving electric current between two ultrasonic vibrators constituting the ultrasonic composite vibrator and performing mutual combination vibration is controlled toπ/2 by controlling each of the oscillators of the two ultrasonic vibrators. COPYRIGHT: (C)2005,JPO&NCIPI
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