| 摘要 |
The temperature coupling of crucible (4) of an effusion cell to a receiving part (1) that surrounds the crucible (4) and serves as a heating-equipped cooling reservoir is improved by inserting, in the space (2) between the crucible (4) and the wall of a recess (1A) in the receiving part (1), a conducting medium with high heat conductivity and low vapor pressure (e.g. Ga, In, Hg or a soft solid). As a result of the improved thermal coupling of crucible (4), the temperature of the crucible (4) follows more rapidly that of the heating-equipped cooling reservoir, such that materials with high vapor pressure and relatively low evaporation temperatures can be deposited under greater control.
|
