,申请号JP20000164111-传众专利搜索

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发明名称
摘要
申请公布号	JP3576464(B2)	申请公布日期	2004.10.13
申请号	JP20000164111	申请日期	2000.06.01
申请人		发明人
分类号	C23C16/50;H01L21/205;(IPC1-7):H01L21/205	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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