STATO-STAGE APPARATUS FOR REALIZING HIGH STANDSTILL-STABILITY AND HIGH RESPONSIVENESS

摘要

PURPOSE: A stato-stage apparatus is provided to realize a high standstill-stability and a high responsiveness in spite of a load of 5 kg or more. CONSTITUTION: A stato-stage apparatus includes a base(100), a tilt stage, and an X-Y stage. The tilt stage includes a tilt plate(201) and at least three converting mechanisms. Each converting mechanism is composed of a first piezo-actuator(Z2-2) and an edge stage(215). The converting mechanism is used for converting a horizontal-direction motion into a vertical-direction motion. The X-Y stage includes an X-Y plate, second piezo-actuators, and a third piezo-actuator. The second piezo-actuators are used for driving the X-Y plate at a plurality of points from one side. The third piezo-actuator is used for driving the X-Y plate from the other side.